Quartz Glass Diffusion Tube

1.Quartz Glass Diffusion Tube

To make IC chip, the key procedures of doping, diffusing, oxidating and annealing of monocrystalline silicon piece have to use high-purity, heat-resistant and low-thermal-expansion quartz glass diffusion tube. The factors that affect the quality, cost and production efficiency of final integrated circuit (IC) and devices are the purity, high temperature deformation resistance, geometric dimension and appearance quality performance of the quartz glass. Currently, the most often used quartz glass has diameter of 200~600mm. They must have large specification, high purity and long life. Moreover, high-purity SiO2 can be applied on the inner surface of the tube, and Al2O3 or SiC can be applied on the outer surface. After hot flame treatment, a crystallite layer will be formed, which can significantly improve the quartz glass's high temperature deformation resistance (increasing from 1200℃æ1280℃).

2.Quartz Glass Crucible

Currently, the diameter is 8~24in (203.2~609.6mm). 90% are for solar monocrystalline silicon, and the remaining are for IC monocrystalline silicon. Usually SiO2 content must be 99.99%.

3.Quartz Glass Boat and Racks, etc.

①Diffusion Furnace Rack; 

②Quartz Boat;

③Quartz Glass Flower Basket; 

④Quartz Glass Rinse Tank

4.Quartz Glass Bell Jar

5.Quartz Glass Flange

6.Quartz glass substrate, used in display in electronics industry. Now, synthetic quartz is used.

7.Quartz Glass for Optical Application

Lens, optic and spraying materials, etc; laser and sensor application, etc.

To make IC chip, the key procedures of doping, diffusing, oxidating and annealing of monocrystalline silicon piece have to use high-purity, heat-resistant and low-thermal-expansion quartz glass diffusion tube. The factors that affect the quality, cost and production efficiency of final integrated circuit (IC) and devices are the purity, high temperature deformation resistance, geometric dimension and appearance quality performance of the quartz glass. Currently, the most often used quartz glass has diameter of 200~600mm. They must have large specification, high purity and long life. Moreover, high-purity SiO2 can be applied on the inner surface of the tube, and Al2O3 or SiC can be applied on the outer surface. After hot flame treatment, a crystallite layer will be formed, which can significantly improve the quartz glass's high temperature deformation resistance (increasing from 1200℃æ1280℃).